BS PD IEC TR 63258:2021

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This document, which is a Technical Report, is focused on the practical protocol of ellipsometryto evaluate the thickness of nanoscale films. This document does not include any specificationof the ellipsometers, but suggests how to minimize the data variation to improve datareproducibility.

All current amendments available at time of purchase are included with the purchase of this document.

Product Details

Published:

03/26/2021

ISBN(s):

9780539009309, 9780539057102

Number of Pages:

24

File Size:

1 file , 1.1 MB

Product Code(s):

30377346, 30377346, 30377346